3D TCAD Simulation for Semiconductor Processes, Devices and - download pdf or read online

By Simon Li

ISBN-10: 1461404800

ISBN-13: 9781461404804

ISBN-10: 1461404819

ISBN-13: 9781461404811

Technology computer-aided layout, or TCAD, is necessary to today’s semiconductor expertise and anyone operating during this must recognize whatever approximately TCAD. This e-book is set how you can use software program to fabricate and attempt nearly semiconductor units in 3D. It brings to lifestyles the subject of semiconductor gadget physics, with a hands-on, instructional technique that de-emphasizes summary physics and equations and emphasizes genuine perform and huge illustrations. assurance encompasses a accomplished library of units, representing the cutting-edge expertise, comparable to SuperJunction LDMOS, GaN LED units, etc.

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Additional info for 3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics

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This is necessary for special applications of 3D TCAD such as nano-scale MOSFET, laser diodes and integrated photonic circuits. 1 Basic Equations The basic equations [16] used to describe the semiconductor device behavior are the Poisson equation,   X ! e0 edc ! 1) and the current continuity equations for electrons and holes, X @n @fD ! 2) X @p @fA ! 3) S. Li and Y. 1007/978-1-4614-0481-1_3, # Springer Science+Business Media, LLC 2012 41 42 3 Advanced Theory of TCAD Device Simulation Fig. , I-V characteristics) of a semiconductor device.

It is obvious that dose matching is a simple shift of origin and the function itself does not need renormalization if the implant function was already normalized for single layer implant. In the range matching method, the effective depth is rescaled from the real depth according to the ranges of the different layers. 50) We notice that in range matching, since the shift in thickness is not based on consumed dose in previous layers. This means the function of the kth layer would not integrate to the remaining dose and thus it is necessary to rescale all the doping functions.

2) It is important to note that the equilibrium vacancy concentration CVà is a function of Fermi level [13]. This flux accounts correctly for the effect of an electric field on the charged portion of the defect concentration. 3) where KR is the bulk recombination coefficient, and CI and CÃV are the interstitial and interstitial equilibrium concentration, respectively. The defects obey a flux balance boundary condition, as described by Hu [14]: ƒ! 4) where * n is the surface normal, KV is the surface recombination constant, and g is the generation, if any, at the surface.

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3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics by Simon Li


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